ETH/PSI Ion Beam Physics

Materials Analysis Techniques

General Overview
 
Method Acronym Detected Elements Sensitivity Accuracy Links
Rutherford Backscattering Spectrometry RBS Be to U Bulk: % to 10-4
Surface: 1 to 10-4 ML		 Stoichiometry: < 1 % 
Layer Thickness: 5 %		 CEA Tutorial
Elastic Recoil Detection Analysis ERDA Hydrogen Bulk: 0.3%  10%

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Heavy Ion ERDA HI-ERDA all Bulk: 0.1 %
Surface: 1 ML		 Stoichiometry: ~ 5 % 
Layer Thickness: ~ 5 % 		  
Nuclear Reaction Analysis NRA H to Al % to ppm 10 %

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Particle Induced X-ray Emission PIXE Na to U 10 to 100 ppm 10 % Harvard CAMS
Channeling C-RBS defect profile in crystals - CEA Tutorial
Accelerator SIMS TEAMS all ppt to ppb normalized to standard

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Thin Layer Activation TLA abrasive wear 100 nm in iron -

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Materials Modification

General Overview Cluster Beams

 

Contacts:

Dr. M. Döbeli, Dr. M. Suter

Electronic Contacts:

doebeli@phys.ethz.ch
 
Last Update 04.04.2007
Send comments or questions to M. Döbeli